{"id":2182,"date":"2026-02-27T11:02:20","date_gmt":"2026-02-27T04:02:20","guid":{"rendered":"https:\/\/htiscientific.vn\/?post_type=product&#038;p=2182"},"modified":"2026-02-27T16:47:35","modified_gmt":"2026-02-27T09:47:35","slug":"may-phu-ma-ion-sputter-coater-spt-20","status":"publish","type":"product","link":"https:\/\/htiscientific.vn\/en\/product\/may-phu-ma-ion-sputter-coater-spt-20\/","title":{"rendered":"M\u00e1y Ph\u1ee7 M\u1ea1 Ion Sputter Coater SPT-20"},"content":{"rendered":"<p style=\"text-align: justify;\" data-start=\"116\" data-end=\"513\"><span style=\"font-size: 14px; color: #000000;\"><a href=\"https:\/\/coxem.com\/products\/ion-sputter-coaters\/spt20\/\">SPT-20<\/a> l\u00e0 thi\u1ebft b\u1ecb ph\u1ee7 kim lo\u1ea1i b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1 ion (Ion Sputter Coater), d\u00f9ng \u0111\u1ec3 ph\u1ee7 l\u1edbp v\u00e0ng\/platinum\/palladium l\u00ean b\u1ec1 m\u1eb7t m\u1eabu, h\u1ed7 tr\u1ee3 quan s\u00e1t SEM. C\u00e1c m\u1eabu kh\u00f4ng d\u1eabn \u0111i\u1ec7n sau khi \u0111\u01b0\u1ee3c ph\u1ee7 c\u00f3 th\u1ec3 quan s\u00e1t d\u01b0\u1edbi k\u00ednh hi\u1ec3n vi \u0111i\u1ec7n t\u1eed; l\u1edbp ph\u1ee7 gi\u00fap b\u1ea3o v\u1ec7 b\u1ec1 m\u1eb7t m\u1eabu kh\u1ecfi ch\u00f9m tia \u0111i\u1ec7n t\u1eed chi\u1ebfu v\u00e0o v\u00e0 h\u1ed7 tr\u1ee3 d\u1eabn \u0111i\u1ec7n, gi\u00fap h\u00ecnh \u1ea3nh quan s\u00e1t r\u00f5 n\u00e9t h\u01a1n. Thi\u1ebft b\u1ecb c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 t\u1ea1o \u0111i\u1ec7n c\u1ef1c d\u1ea1ng m\u00e0ng m\u1ecfng.<\/span><\/p>\n<p style=\"text-align: justify;\" data-start=\"116\" data-end=\"513\"><span style=\"font-size: 14px; color: #000000;\">H\u00e3ng s\u1ea3n xu\u1ea5t: COXEM \u2013 H\u00e0n Qu\u1ed1c<\/span><br \/>\n<span style=\"font-size: 14px; color: #000000;\">Model: SPT-20<\/span><\/p>\n<p style=\"text-align: justify;\" data-start=\"515\" data-end=\"536\"><span style=\"font-size: 14px; color: #000000;\">\u0110\u1eb7c \u0111i\u1ec3m n\u1ed5i b\u1eadt:<\/span><\/p>\n<ul style=\"text-align: justify;\" data-start=\"537\" data-end=\"802\">\n<li data-section-id=\"wwkbze\" data-start=\"537\" data-end=\"564\">\n<p data-start=\"539\" data-end=\"564\"><span style=\"font-size: 14px; color: #000000;\">M\u00e1y ph\u1ee7 ion k\u1ef9 thu\u1eadt s\u1ed1<\/span><\/p>\n<\/li>\n<li data-section-id=\"lin6qt\" data-start=\"565\" data-end=\"636\">\n<p data-start=\"567\" data-end=\"636\"><span style=\"font-size: 14px; color: #000000;\">H\u1ec7 th\u1ed1ng ph\u1ee7 ch\u00e2n kh\u00f4ng; thao t\u00e1c ph\u1ee7 m\u1ed9t ch\u1ea1m t\u1eeb \u00e1p su\u1ea5t kh\u00ed quy\u1ec3n<\/span><\/p>\n<\/li>\n<li data-section-id=\"krmw35\" data-start=\"637\" data-end=\"688\">\n<p data-start=\"639\" data-end=\"688\"><span style=\"font-size: 14px; color: #000000;\">L\u1edbp ph\u1ee7 \u1ed5n \u0111\u1ecbnh v\u1edbi ch\u1ee9c n\u0103ng ph\u1ea3n h\u1ed3i d\u00f2ng ph\u1ee7<\/span><\/p>\n<\/li>\n<li data-section-id=\"1o2gvw8\" data-start=\"689\" data-end=\"745\">\n<p data-start=\"691\" data-end=\"745\"><span style=\"font-size: 14px; color: #000000;\">C\u00f3 th\u1ec3 s\u1eed d\u1ee5ng v\u1edbi nhi\u1ec1u lo\u1ea1i bia kim lo\u1ea1i kh\u00e1c nhau<\/span><\/p>\n<\/li>\n<li data-section-id=\"1xnbss3\" data-start=\"746\" data-end=\"802\">\n<p data-start=\"748\" data-end=\"802\"><span style=\"font-size: 14px; color: #000000;\">S\u1eed d\u1ee5ng b\u01a1m ch\u00e2n kh\u00f4ng quay (rotary pump) \u0111\u1ed9 \u1ed3n th\u1ea5p<\/span><\/p>\n<\/li>\n<\/ul>\n<h3 style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt ch\u00ednh<\/span><\/h3>\n<ul>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">Ngu\u1ed3n \u0111i\u1ec7n ti\u00eau th\u1ee5: AC 220V, 300W<\/span><\/li>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">K\u00edch th\u01b0\u1edbc: 420 (R\u1ed9ng) \u00d7 220 (S\u00e2u) \u00d7 230 mm<\/span><\/li>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">Kh\u1ed1i l\u01b0\u1ee3ng: 10 kg<\/span><\/li>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">Target kim lo\u1ea1i ph\u1ee7: V\u00e0ng \/ Platinum \/ Palladium<\/span>\n<ul>\n<li><span style=\"font-size: 14px; color: #000000;\">K\u00edch th\u01b0\u1edbc target ti\u00eau chu\u1ea9n: \u0110\u01b0\u1eddng k\u00ednh 50.8 mm \u00d7 d\u00e0y 0.1 mm<\/span><\/li>\n<li><span style=\"font-size: 14px; color: #000000;\">M\u1eb7c \u0111\u1ecbnh l\u1eafp s\u1eb5n target V\u00e0ng<\/span><\/li>\n<\/ul>\n<\/li>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">\u0110\u1ed9 ch\u00e2n kh\u00f4ng v\u1eadn h\u00e0nh: Kho\u1ea3ng 0.1 Torr<\/span><\/li>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">\u0110i\u1ec7n \u00e1p ion t\u1ed1i \u0111a: ~ 3 kV<\/span><\/li>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">D\u00f2ng ion: 1 \u2013 9 mA<\/span><\/li>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">Th\u1eddi gian ph\u1ee7: 10 \u2013 700 gi\u00e2y<\/span><\/li>\n<li style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">B\u01a1m ch\u00e2n kh\u00f4ng: B\u01a1m quay 50L<\/span><\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p style=\"text-align: justify;\"><span style=\"font-size: 14px; color: #000000;\">SPT-20 l\u00e0 thi\u1ebft b\u1ecb ph\u1ee7 kim lo\u1ea1i b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1 ion (Ion Sputter Coater), d\u00f9ng \u0111\u1ec3 ph\u1ee7 l\u1edbp v\u00e0ng\/platinum\/palladium l\u00ean b\u1ec1 m\u1eb7t m\u1eabu, h\u1ed7 tr\u1ee3 quan s\u00e1t SEM. C\u00e1c m\u1eabu kh\u00f4ng d\u1eabn \u0111i\u1ec7n sau khi \u0111\u01b0\u1ee3c ph\u1ee7 c\u00f3 th\u1ec3 quan s\u00e1t d\u01b0\u1edbi k\u00ednh hi\u1ec3n vi \u0111i\u1ec7n t\u1eed; l\u1edbp ph\u1ee7 gi\u00fap b\u1ea3o v\u1ec7 b\u1ec1 m\u1eb7t m\u1eabu kh\u1ecfi ch\u00f9m tia \u0111i\u1ec7n t\u1eed chi\u1ebfu v\u00e0o v\u00e0 h\u1ed7 tr\u1ee3 d\u1eabn \u0111i\u1ec7n, gi\u00fap h\u00ecnh \u1ea3nh quan s\u00e1t r\u00f5 n\u00e9t h\u01a1n. Thi\u1ebft b\u1ecb c\u0169ng c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 t\u1ea1o \u0111i\u1ec7n c\u1ef1c d\u1ea1ng m\u00e0ng m\u1ecfng.<\/span><\/p>","protected":false},"featured_media":2183,"template":"","meta":{"inline_featured_image":false},"product_brand":[129],"product_cat":[130,134],"product_tag":[],"class_list":{"0":"post-2182","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_brand-coxem","7":"product_cat-kinh-hien-vi-dien-tu-quet","8":"product_cat-may-phu-ma-ion-sputter-coater","10":"first","11":"instock","12":"shipping-taxable","13":"product-type-simple"},"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v24.7 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>M\u00e1y Ph\u1ee7 M\u1ea1 Ion Sputter Coater SPT-20 - HTI Scientific<\/title>\n<meta name=\"description\" content=\"SPT-20 l\u00e0 thi\u1ebft b\u1ecb ph\u1ee7 kim lo\u1ea1i b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1 ion, d\u00f9ng \u0111\u1ec3 ph\u1ee7 l\u1edbp v\u00e0ng\/platinum\/palladium l\u00ean b\u1ec1 m\u1eb7t m\u1eabu, h\u1ed7 tr\u1ee3 quan s\u00e1t SEM\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/htiscientific.vn\/en\/product\/may-phu-ma-ion-sputter-coater-spt-20\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"M\u00e1y Ph\u1ee7 M\u1ea1 Ion Sputter Coater SPT-20 - 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