{"id":2476,"date":"2026-06-25T11:11:07","date_gmt":"2026-06-25T04:11:07","guid":{"rendered":"https:\/\/htiscientific.vn\/?p=2476"},"modified":"2026-06-25T11:11:07","modified_gmt":"2026-06-25T04:11:07","slug":"kinh-hien-vi-dien-tu-quet-kham-pha-cau-truc-ban-dan","status":"publish","type":"post","link":"https:\/\/htiscientific.vn\/en\/kinh-hien-vi-dien-tu-quet-kham-pha-cau-truc-ban-dan\/","title":{"rendered":"K\u00ednh hi\u1ec3n vi \u0111i\u1ec7n t\u1eed qu\u00e9t – Kh\u00e1m ph\u00e1 c\u1ea5u tr\u00fac b\u00e1n d\u1eabn\u00a0"},"content":{"rendered":"

Ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn s\u1ea3n xu\u1ea5t c\u00e1c linh ki\u1ec7n c\u1ed1t l\u00f5i cho thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed v\u00e0 h\u1ec7 th\u1ed1ng m\u00e1y t\u00ednh, t\u1ea1o n\u1ec1n t\u1ea3ng cho c\u00f4ng ngh\u1ec7 hi\u1ec7n \u0111\u1ea1i v\u00e0 \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong s\u1ef1 ph\u00e1t tri\u1ec3n c\u00f4ng nghi\u1ec7p v\u00e0 c\u00f4ng ngh\u1ec7 to\u00e0n c\u1ea7u. C\u00e1c s\u1ea3n ph\u1ea9m b\u00e1n d\u1eabn ch\u1ee7 y\u1ebfu bao g\u1ed3m m\u1ea1ch t\u00edch h\u1ee3p (IC), chip nh\u1edb nh\u01b0 DRAM v\u00e0 NAND, c\u00f9ng c\u00e1c b\u1ed9 x\u1eed l\u00fd nh\u01b0 CPU v\u00e0 GPU.<\/span><\/p>\n

Chip b\u00e1n d\u1eabn \u0111\u01b0\u1ee3c c\u1ea5u th\u00e0nh t\u1eeb h\u00e0ng t\u1ef7 transistor v\u00e0 c\u00e1c c\u1ea5u tr\u00fac m\u1ea1ch \u0111i\u1ec7n \u0111\u01b0\u1ee3c t\u00edch h\u1ee3p v\u1edbi m\u1eadt \u0111\u1ed9 c\u1ef1c cao trong kh\u00f4ng gian r\u1ea5t nh\u1ecf. \u0110\u1ec3 \u0111\u1ea3m b\u1ea3o thi\u1ebft b\u1ecb ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh, m\u1ed7i th\u00e0nh ph\u1ea7n ph\u1ea3i \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o ch\u00ednh x\u00e1c v\u00e0 k\u1ebft n\u1ed1i \u0111\u00fang v\u1ecb tr\u00ed. Do k\u00edch th\u01b0\u1edbc vi m\u00f4 v\u00e0 \u0111\u1ed9 ph\u1ee9c t\u1ea1p cao c\u1ee7a c\u1ea5u tr\u00fac b\u00e1n d\u1eabn, vi\u1ec7c gi\u1ea3m thi\u1ec3u khuy\u1ebft t\u1eadt th\u00f4ng qua c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd l\u00e0 y\u1ebfu t\u1ed1 then ch\u1ed1t.<\/span><\/p>\n

Th\u00f4ng qua vi\u1ec7c chu\u1ea9n b\u1ecb b\u1ec1 m\u1eb7t ho\u1eb7c m\u1eb7t c\u1eaft ngang c\u1ee7a m\u1eabu b\u00e1n d\u1eabn b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p m\u00e0i \u0111\u00e1nh b\u00f3ng b\u1eb1ng ch\u00f9m ion (ion milling) v\u00e0 quan s\u00e1t b\u1eb1ng k\u00ednh hi\u1ec3n vi \u0111i\u1ec7n t\u1eed qu\u00e9t (SEM), c\u00f3 th\u1ec3 x\u00e1c \u0111\u1ecbnh ch\u00ednh x\u00e1c \u0111\u1ed9 s\u00e2u khuy\u1ebft t\u1eadt c\u0169ng nh\u01b0 v\u1ecb tr\u00ed h\u01b0 h\u1ecfng, t\u1eeb \u0111\u00f3 h\u1ed7 tr\u1ee3 ph\u00e2n t\u00edch nguy\u00ean nh\u00e2n g\u1ed1c r\u1ec5 v\u00e0 t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/span><\/p>\n

IP-10K<\/a> c\u1ee7a COXEM l\u00e0 h\u1ec7 th\u1ed1ng \u0111\u00e1nh b\u00f3ng b\u1eb1ng ch\u00f9m ion argon \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 chu\u1ea9n b\u1ecb b\u1ec1 m\u1eb7t v\u00e0 m\u1eb7t c\u1eaft m\u1eabu v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao. B\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng k\u1ef9 thu\u1eadt m\u00e0i b\u1eb1ng ion argon, h\u1ec7 th\u1ed1ng t\u1ea1o ra c\u00e1c b\u1ec1 m\u1eb7t s\u1ea1ch, gi\u1ea3m thi\u1ec3u h\u01b0 h\u1ea1i m\u1eabu, ph\u1ee5c v\u1ee5 cho vi\u1ec7c quan s\u00e1t SEM ch\u1ea5t l\u01b0\u1ee3ng cao. Do argon l\u00e0 kh\u00ed tr\u01a1 v\u1ec1 m\u1eb7t h\u00f3a h\u1ecdc, qu\u00e1 tr\u00ecnh x\u1eed l\u00fd h\u1ea1n ch\u1ebf t\u1ed1i \u0111a c\u00e1c ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc kh\u00f4ng mong mu\u1ed1n, gi\u00fap vi\u1ec7c ph\u00e2n t\u00edch th\u00e0nh ph\u1ea7n v\u00e0 c\u1ea5u tr\u00fac v\u1eadt li\u1ec7u b\u00e1n d\u1eabn tr\u1edf n\u00ean \u0111\u00e1ng tin c\u1eady h\u01a1n.<\/span><\/p>\n

Quy Tr\u00ecnh Chu\u1ea9n B\u1ecb M\u1eabu<\/span><\/h1>\n

\u0110\u1ed1i v\u1edbi qu\u00e1 tr\u00ecnh m\u00e0i ph\u1eb3ng di\u1ec7n t\u00edch l\u1edbn (flat milling), m\u1eabu tr\u01b0\u1edbc ti\u00ean \u0111\u01b0\u1ee3c \u0111\u00fac trong nh\u1ef1a epoxy v\u00e0 \u0111\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc \u0111\u1ec3 t\u1ea1o ra b\u1ec1 m\u1eb7t gia c\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u. V\u00ec qu\u00e1 tr\u00ecnh flat milling ch\u1ec9 lo\u1ea1i b\u1ecf m\u1ed9t l\u1edbp v\u1eadt li\u1ec7u r\u1ea5t m\u1ecfng tr\u00ean b\u1ec1 m\u1eb7t n\u00ean \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t qu\u00e1 l\u1edbn s\u1ebd l\u00e0m gi\u1ea3m \u0111\u00e1ng k\u1ec3 hi\u1ec7u qu\u1ea3 gia c\u00f4ng b\u1eb1ng ion.<\/span><\/p>\n

COXEM khuy\u1ebfn ngh\u1ecb chu\u1ea9n b\u1ecb b\u1ec1 m\u1eb7t m\u1eabu \u0111\u1ea1t \u0111\u1ed9 nh\u00e1m nh\u1ecf h\u01a1n 1 \u03bcm tr\u01b0\u1edbc khi th\u1ef1c hi\u1ec7n flat milling nh\u1eb1m \u0111\u1ea1t \u0111\u01b0\u1ee3c ch\u1ea5t l\u01b0\u1ee3ng \u0111\u00e1nh b\u00f3ng t\u1ed1i \u01b0u.<\/span><\/p>\n

    \n
  • B\u01b0\u1edbc 1: C\u1eaft m\u1eabu v\u1ec1 k\u00edch th\u01b0\u1edbc ph\u00f9 h\u1ee3p v\u00e0 c\u1ed1 \u0111\u1ecbnh m\u1eabu b\u1eb1ng k\u1eb9p \u0111\u1ec3 c\u00f3 th\u1ec3 \u0111\u1eb7t v\u1eeba trong khu\u00f4n \u0111\u00fac.<\/span><\/li>\n
  • B\u01b0\u1edbc 2: Tr\u1ed9n nh\u1ef1a \u0111\u00fac ngu\u1ed9i (cold-mounting resin) v\u00e0 ch\u1ea5t \u0111\u00f3ng r\u1eafn theo t\u1ef7 l\u1ec7 \u0111\u01b0\u1ee3c khuy\u1ebfn ngh\u1ecb.<\/span><\/li>\n
  • B\u01b0\u1edbc 3: \u0110\u1eb7t m\u1eabu v\u00e0o khu\u00f4n v\u00e0 \u0111\u1ed5 h\u1ed7n h\u1ee3p epoxy \u0111\u00e3 tr\u1ed9n v\u00e0o khu\u00f4n.<\/span><\/li>\n
  • B\u01b0\u1edbc 4: \u0110\u1ec3 epoxy \u0111\u00f3ng r\u1eafn ho\u00e0n to\u00e0n \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng, sau \u0111\u00f3 th\u00e1o m\u1eabu \u0111\u00e3 c\u1ee9ng ra kh\u1ecfi khu\u00f4n.<\/span><\/li>\n
  • B\u01b0\u1edbc 5: Th\u1ef1c hi\u1ec7n \u0111\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc t\u1eeb b\u01b0\u1edbc m\u00e0i th\u00f4 \u0111\u1ebfn m\u00e0i tinh cho \u0111\u1ebfn khi \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t cu\u1ed1i c\u00f9ng nh\u1ecf h\u01a1n 1 \u03bcm.<\/span><\/li>\n
  • B\u01b0\u1edbc 6: Sau khi \u0111\u00e1nh b\u00f3ng, g\u1eafn m\u1eabu l\u00ean gi\u00e1 gi\u1eef m\u1eabu d\u00e0nh cho ch\u1ebf \u0111\u1ed9 Flat Milling \u0111\u1ec3 ti\u1ebfn h\u00e0nh m\u00e0i b\u1eb1ng ion.<\/span><\/li>\n<\/ul>\n

    \"\"<\/span><\/p>\n

    Gia C\u00f4ng B\u1eb1ng Ch\u00f9m Ion\u00a0<\/span><\/h2>\n

    \"\" \"\"<\/p>\n

    Qu\u00e1 tr\u00ecnh flat milling \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n trong 10 ph\u00fat v\u1edbi ch\u00f9m ion c\u00f3 \u0111i\u1ec7n \u00e1p gia t\u1ed1c 4 kV v\u00e0 g\u00f3c t\u1edbi 88\u00b0.<\/span><\/p>\n

    Tr\u01b0\u1edbc khi th\u1ef1c hi\u1ec7n ion milling, c\u00e1c c\u1eb7n v\u1eadt li\u1ec7u ph\u1ee7 v\u00e0 t\u1ea1p ch\u1ea5t tr\u00ean b\u1ec1 m\u1eb7t m\u1eabu sau qu\u00e1 tr\u00ecnh \u0111\u00fac g\u00e2y c\u1ea3n tr\u1edf vi\u1ec7c quan s\u00e1t SEM m\u1ed9t c\u00e1ch r\u00f5 r\u00e0ng. Sau khi gia c\u00f4ng b\u1eb1ng ion, b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng s\u1ea1ch s\u1ebd, gi\u00fap b\u1ed9c l\u1ed9 r\u00f5 c\u1ea5u tr\u00fac b\u00ean d\u01b0\u1edbi v\u1edbi \u0111\u1ed9 s\u1eafc n\u00e9t \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n \u0111\u00e1ng k\u1ec3.<\/span><\/p>\n

    \"\" \"\"<\/p>\n

    H\u00ecnh \u1ea2nh SEM<\/span><\/h2>\n

    C\u00f9ng m\u1ed9t khu v\u1ef1c tr\u00ean m\u1eabu \u0111\u01b0\u1ee3c so s\u00e1nh tr\u01b0\u1edbc v\u00e0 sau khi th\u1ef1c hi\u1ec7n ion milling.<\/span><\/p>\n

    \"\" \"\" \"\"<\/p>\n

    Tr\u01b0\u1edbc khi gia c\u00f4ng b\u1eb1ng ion, tr\u00ean b\u1ec1 m\u1eb7t v\u1eabn c\u00f2n c\u00e1c v\u1ebft x\u01b0\u1edbc do qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc v\u00e0 c\u00e1c t\u1ea1p ch\u1ea5t c\u00f2n s\u00f3t l\u1ea1i t\u1eeb v\u1eadt li\u1ec7u \u0111\u00e1nh b\u00f3ng. Nh\u1eefng y\u1ebfu t\u1ed1 n\u00e0y l\u00e0m gi\u1ea3m kh\u1ea3 n\u0103ng quan s\u00e1t r\u00f5 m\u1eb7t c\u1eaft ngang c\u1ee7a bi h\u00e0n.<\/span><\/p>\n

    Sau khi x\u1eed l\u00fd b\u1eb1ng ch\u00f9m ion, c\u00e1c t\u1ea1p ch\u1ea5t b\u1ec1 m\u1eb7t v\u00e0 v\u1ebft x\u01b0\u1edbc \u0111\u00e1nh b\u00f3ng \u0111\u01b0\u1ee3c lo\u1ea1i b\u1ecf hi\u1ec7u qu\u1ea3, cho ph\u00e9p quan s\u00e1t r\u00f5 h\u01a1n c\u00e1c ranh gi\u1edbi h\u1ea1t b\u00ean trong bi h\u00e0n, \u0111\u1ed3ng th\u1eddi n\u00e2ng cao \u0111\u00e1ng k\u1ec3 ch\u1ea5t l\u01b0\u1ee3ng h\u00ecnh \u1ea3nh SEM.<\/span><\/p>\n

    Source: Coxem<\/p>","protected":false},"excerpt":{"rendered":"

    Ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn s\u1ea3n xu\u1ea5t c\u00e1c linh ki\u1ec7n c\u1ed1t l\u00f5i cho thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed v\u00e0 h\u1ec7 th\u1ed1ng m\u00e1y t\u00ednh, t\u1ea1o n\u1ec1n t\u1ea3ng cho c\u00f4ng ngh\u1ec7 hi\u1ec7n \u0111\u1ea1i v\u00e0 \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong s\u1ef1 ph\u00e1t tri\u1ec3n c\u00f4ng nghi\u1ec7p v\u00e0 c\u00f4ng ngh\u1ec7 to\u00e0n c\u1ea7u. C\u00e1c s\u1ea3n ph\u1ea9m…<\/p>","protected":false},"author":2,"featured_media":2499,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"inline_featured_image":false,"footnotes":""},"categories":[17,1],"tags":[],"class_list":["post-2476","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-blog","category-tin-tuc"],"yoast_head":"\nK\u00ednh hi\u1ec3n vi \u0111i\u1ec7n t\u1eed qu\u00e9t - Kh\u00e1m ph\u00e1 c\u1ea5u tr\u00fac b\u00e1n d\u1eabn\u00a0 - HTI Scientific<\/title>\n<meta name=\"description\" content=\"Chip b\u00e1n d\u1eabn \u0111\u01b0\u1ee3c c\u1ea5u th\u00e0nh t\u1eeb h\u00e0ng t\u1ef7 transistor v\u00e0 c\u00e1c c\u1ea5u tr\u00fac m\u1ea1ch \u0111i\u1ec7n \u0111\u01b0\u1ee3c t\u00edch h\u1ee3p v\u1edbi m\u1eadt \u0111\u1ed9 c\u1ef1c cao trong kh\u00f4ng gian r\u1ea5t nh\u1ecf\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, 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